| Working Area Size (D*H mm) | Φ200*300 | Φ300*600 | Φ400*900 |
|---|---|---|---|
| Ultimate Vacuum (Pa) | 1*10-4 / 1*10-3 | 1*10-4 / 1*10-3 | 1*10-4 / 1*10-3 |
| Maximum Temperature (℃) | 2400 / 2500 | 2400 / 2500 | 2400 / 2500 |
| Temperature Uniformity (℃) | ±7.5 | ±7.5 | ±10 |
| Pressure Rise Rate (Pa/h) | 0.67 | 0.67 | 0.67 |